WHITE LIGHT INTERFEROMETER - ZYGO NEWVIEW 100 SURFACE PROFILER 

The Zygo Newview 100 surface profiler is a white-light interferometer, providing surface topography, surface roughness and film thickness measurements to an accuracy of 0.1 nm.

The basic operation of the system is described below:-

1)  An interference pattern (contour lines) is generated which corresponds the profile or contour map of the sample surface.

2)  The objective is scanned, using a piezo drive unit, through a displacement of 100 µm and the variation of the interference pattern or the motion of the fringes is recorded by the CCD Camera.

3)  The computer performs FFT on the collected data to generate a surface profile.

One of the key advantages of white light interferometry over mechanical stylus measurements is the fact that the instrument can make measurements on soft, easily deformed materials such as polymers.

Technical Specifications

Field of view:- variable from 6 x 4.5 mm down to 0.18 x 0.14 mm

Maximum vertical step height :- 100 µm

Minimum vertical resolution :- 0.1 nm

Objectives :- 2.5X, 10X and 20X (Zoom 0.5X to 2.0X)

Zygo Newview 100 surface profiler in NCLA

Profilometry image of marks on glass surface

Profilometry image of a laser-etched channel in PET material