EP458: NANOTECHNOLOGY

Texts

Nanophysics & Nanotechnology: An Introduction to Modern Concepts in Nanoscience, (2nd edition), Edward Wolf, Wiley VCH.
ISBN -10: 3-527-406514

Semiconductor Devices – Physics & Technology, S.M. Sze, John Wiley & Sons,
ISBN 0 471 33372-7 –

Syllabus

• Introduction to smallness, systematics of making things smaller, what are the limits of smallness
• Miniaturization in semiconductors: Semiconductor materials and their properties. Low dimensional quantum structures
• Physics of fabrication 1 (Top-down): Techniques for micro-scale electronics: Production of doped silicon. Single crystal growth, Diffusion, Ion implantation, Lithography, Epitaxy, metallization, etching.
• Case studies: Devices based on metal oxide semiconductors, memory cells, displays, accelerometer, digital mirrors
• Physics of fabrication 2 (Top-down): Techniques for opto-electronic devices; Metal Organic Vapour Phase Epitaxy (MOVPE), Molecular Beam Epitaxy (MBE)
• Case studies: Devices based on III-V materials and heterostructures, eg. the diode laser, MESFET transistors
• Physics of fabrication 3 (Bottom –up): Carbon based materials, fullerenes & carbon nanotubes
• Physics of fabrication 4 (Bottom-up): Nanoparticles, Convective assembly, self assembly
• Future perspectives: Drexler’s machines, soft condensed matter, synthetic biology.

Lecturer

gerard.oconnornuigalway.ie

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